- Unit: Faculty of Chemistry and Geosciences
- Keywords: Scanning Electronic Microscope, SEM, Hitachi, TM3000, surface test, chemical micro-analysis
- Responsible person: Simas Šakirzanovas, tel. +370 5 219 3190,
Table scanning electronic microscope with EDS detector.
Resolution > 30 nm, magnification up to x30000. It is possible to perform measurements in shallow vacuum.
Application. Research of solid surfaces by scanning electronic microscope; chemical micro-analysis of solids using scanning electronic microscope with EDS detector.