- Unit: Faculty of Physics
- Keywords: Solid state sample surface, scanning electron microscope, SEM, CamScan, Apollo 300, optoelectronics, chemistry, food industry, metal industry, textile industry
Investigation of morphology of solid state sample surface with scanning electron microscope (SEM) CamScan Apollo 300.
The source of electrons - Schottky field emission electron gun. Detectors – secondary electron, back scattered electron. Accelerating voltage – 5-10 kV. Max. resolution – 2 nm at 20 kV. Sample must be in high vacuum (from 10-7 Bar). Max. sample size 15 cm, max. sample height 5 cm.
Application: Investigation of morphology of solid state sample surface with SEM for optoelectronic, chemical, food, metal and other industries. Possibility to visualise the surface of solid state sample under investigation, at 2÷10 nm resolution.