- Unit: Faculty of Physics
- Keywords: Resistance, sheet resistance, bulk resistance
Sheet resistance and bulk resistance measurements by four point probe method and determination of the type of conductivity of the sample. A wide range of parameters and the abscence of contact resistance ensures accurate results and simplifies the measurement procedure.
The operation of the device is based on the contact of the four needle type electrodes with the surface of the sample.
A constant current is applied to two probes and the potential is registered on the other two central probes. The measured data can be transferred and saved in to computer. This equipment is ideal for small, various shape samples with flat surface, to determine their resistance and conductivity type.
Measures one sample at a time.
Voltage measurement range: 0.01 - 1250 mV.
Current measurement range: 10 nA - 99.99 mA.
Sheet resistance measurement range: 1 mΩ/□ – 500 MΩ/□ (it is possible to measure beyond this range, but the result accuracy will decrease respectively).
Bulk resistance measurement range: 1m Ω.cm - 1M Ω.cm (possibility to measure beyond this range depends on the thickness of the sample).
Sample diameter up to 76 mm.
Application. Applicable in silicon, germanium materials and microelectronics.