Plasma cleaning equipment (Diener, plasma system type "Nano")

Unit: Faculty of Chemistry and Geosciences

Keywords: Plasma cleaning equipment, surface cleaning, Diener

Responsible person: Simas Šakirzanovas, +370 5 2193190,

Device is suitable for surface cleaning / activation using various gas plasma.

Chamber capacity 18 L, plasma generator 13.56 MHz 0-300 W. Gas: oxygen, argon, nitrogen, hydrogen (automatic mixture production control). Rotating drum for activating bulk samples.