- Unit: Faculty of Physics
- Keywords: Surface morphology, surface roughness, atomic force microscope, AFM
Atomic force microscope employs a sharp probe to study surface roughness. The probe bends as it encounters surface roughness.
The change in position of the probe is registered and used to calculate the dimensions of the roughness. The image is formed as the probe raster scans sample surface. The maximum area of single measurement is 80×80 µm2.
AFM measurements are conducted in contact mode with ~10 nm spatial resolution. All the measurements are performed at room temperature.
Application. Measurements of semiconductor materials. Semiconductor and semiconductor compounds industry.