Thin-film coating by modular spin processor

Unit: Life Sciences Center
Keywords: Spin coating

For surface coating with various thin-films by spin coater,Substrate sizes from 3 mm to 150 mm wafers, maximum rotation speed 12 000 rpm.

Application. Spin coating of various surfaces with thin-films. 

Contacts: Dr. Tadas Ragaliauskas, tel. +370 5 223 4401,