- Unit: Faculty of Physics
- Keywords: Femtosecond laser, microfabrication, 5-axis positioning system, Aerotech, Pharos
Microfabrication is performed using Aerotech mid motion five coordinates precision positioning module with unique set of equipment and diagnostic and Light Conversion femtosecond Yb:KGW laser Pharos.
Parameters of the laser: maximum repetition rate of the laser is 200 kHz, central wavelength is 1030 nm and pulse duration 320 fs.
Application. Microfabrication, investigation of femtosecond laser radiation and material interaction.